Special interest group (SIG) summary: Plasma-Induced Damage (PID)

This special interest group discussed the topic “Plasma Induced Damage”. A questionnaire was distributed among the experts and the questionnaire results are reported in Table 1. This SIG summary reflects the group´s discussion results. Please note, that the order of topics reported here, follows the sequence of the discussion of the SIG. The order does not reflect the priority of the PID-topics. The significant results/decisions with common agreement are summarized in the conclusions.