Title :
Advanced sensors and actuators and their incorporation into micro electromechanical systems
Author_Institution :
Dept. of Electr. & Electromech. Syst., Tech. Univ. Liberec, Czech Republic
Abstract :
The paper deals with material properties of piezoelectric relaxer based single crystals 0.91Pb(Zn1/3Nb2/3)-0.09PbTiO 3 (PZN-PT), which are important for application in actuators and sensors. The electromechanical coupling coefficient k33, elastic coefficient s33D and piezoelectric coefficient d33 are determined using dynamic (resonant) and static methods of measurement. Strain vs. electric field characteristic with low hysteresis was observed for this single crystal. Design of an actuator of small displacements is presented. The integration possibilities of electromechanical elements into a high degree integration density (VLSI) circuits and creation of the micro-electromechanical systems (MEMS) are mentioned. The VLSI circuits are designed as digital ASIC circuits using CADENCE software
Keywords :
VLSI; digital integrated circuits; lead compounds; microactuators; microsensors; niobium compounds; piezoelectric actuators; piezoelectric transducers; titanium compounds; zinc compounds; 0.91Pb(Zn1/3Nb2/3)-0.09PbTiO3; CADENCE software; MEMS; Pb(ZnNb)-PbTiO3; VLSI circuits; actuators; digital ASIC circuits; dynamic measurement methods; elastic coefficient; electric field characteristic; electromechanical coupling coefficient; ferroelectric single crystals; low hysteresis; material properties; micro electromechanical systems; piezoelectric coefficient; piezoelectric relaxer based single crystals; sensors; single crystal; static measurement methods; strain; Capacitive sensors; Crystals; Electromechanical sensors; Integrated circuit measurements; Material properties; Niobium; Piezoelectric actuators; Resonance; Sensor phenomena and characterization; Very large scale integration;
Conference_Titel :
Industrial Electronics, 2000. ISIE 2000. Proceedings of the 2000 IEEE International Symposium on
Conference_Location :
Cholula, Puebla
Print_ISBN :
0-7803-6606-9
DOI :
10.1109/ISIE.2000.930355
