On-chip integrated silicon bulk-micromachined soil moisture sensor with electronics and bus interface

This paper presents an on-chip silicon bulk-micromachined soil moisture sensor (SMS) for irrigation control in greenhouses. The system-on-a-chip includes the SMS, readout electronics, self-test, calibration facilities and a digital bus interface for external data transmission. Moreover, this low-cost device can be applied in several locations (e.g. per each plant root), and networked together with the 1-wire bus. The heat-pulse technique is used (for measuring the maximum temperature on a distant point) to determine the volumetric heat capacity and hence the water content of a porous media, such as soil. In order to validate this method, experimental results were achieved with a macrosensor based on the heat-pulse and capacitance methods. The capacitance method relates the volumetric water content with the capacitance change (dielectric properties) of a probe, inserted in the soil and water contents. These results are compared with the measurement achieved using the conventional thermogravimetric method