Title :
Reducing Atomic Force Microscope Tip Deflection using Command Shaping
Author :
Elsberry, Allan H. ; Robertson, Michael J.
Author_Institution :
United States Naval Acad., Annapolis
Abstract :
Dynamic atomic force microscopy (AFM) is a popular scanning method that utilizes an oscillating cantilever tip to interact with and develop high resolution images of surfaces. Though this method is one of the most versatile in AFM, it is dependent upon maintaining constant oscillation amplitude. Constant oscillation amplitude can be difficult to achieve when probe movement is necessary to maintain an appropriate tip to sample distance. This paper documents the effectiveness of command shaping techniques in reducing the probe´s tip deflection during the scanning process. Command shapers are used to modify the movements of the scanning probe base in response to changes in the sample´s surface. Reducing tip deflection and tip tracking error improve the quality of the scanned image while reducing the likelihood of damage to the sample or the probe.
Keywords :
atomic force microscopy; cantilevers; image resolution; atomic force microscope tip deflection; cantilever tip oscillation; command shaping; constant oscillation amplitude; probe movement; scanning method; surface high resolution images; Atomic force microscopy; Feedback control; Force control; Force feedback; Force measurement; Image resolution; Probes; Scanning electron microscopy; Transmission electron microscopy; Weapons;
Conference_Titel :
System Theory, 2008. SSST 2008. 40th Southeastern Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
978-1-4244-1806-0
Electronic_ISBN :
0094-2898
DOI :
10.1109/SSST.2008.4480246