DocumentCode :
3200074
Title :
Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices
Author :
Hansen, Ulli ; Maus, Simon ; Leib, Juergen ; Toepper, Michael
Author_Institution :
MSG Lithoglas AG, Berlin, Germany
fYear :
2010
fDate :
13-16 Sept. 2010
Firstpage :
1
Lastpage :
5
Abstract :
The novel wafer-level packaging (WLP) process invented allows hermetic capping of optical devices on wafer-level yielding miniaturized glass cavity windows on top of the optical area, at the same time leaving the contact area accessible for standard electrical connections i.e. wire bond. These optical cavity packages are used within standard chip-on-board (COB) assemblies for high performance optical applications providing high yields and utmost reliability for miniaturized optical devices at low costs.
Keywords :
chip-on-board packaging; hermetic seals; integrated optoelectronics; micromechanical devices; wafer level packaging; COB assembly; MEMS device; WLP process; chip-on-board assembly; contact area; glass capping technology; hermetic capping technology; miniaturized glass cavity windows; miniaturized optical device; optical applications; optical area; standard electrical connections; wafer level packaging; wire bond; Cavity resonators; Glass; Optical imaging; Optical sensors; Performance evaluation; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic System-Integration Technology Conference (ESTC), 2010 3rd
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-8553-6
Electronic_ISBN :
978-1-4244-8554-3
Type :
conf
DOI :
10.1109/ESTC.2010.5642987
Filename :
5642987
Link To Document :
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