Film-substrate a-Si solar cells and their novel process technologies

Author

Fujikake, S. ; Tabuchi, K. ; Takano, A. ; Wada, T. ; Saito, S. ; Sato, H. ; Yoshida, T. ; Ichikawa, Y. ; Sakai, H.

Author_Institution

Fuji Electr. Corp. Res. & Dev. Ltd., Kanagawa, Japan

fYear

1996

fDate

13-17 May 1996

Firstpage

1045

Lastpage

1048

Abstract

A fabrication process of a double-junction amorphous silicon solar cell formed on a plastic film-substrate has been developed. The solar cell has a new monolithic series-connected structure named “SCAF” and is fabricated by a newly developed fabrication process including “Stepping-Roll” film deposition process. The details of the new process are presented and its advantage is described. We developed the new Stepping-Roll film deposition system composed of 6 CVD reactors and 2 sputtering reactors, and fabricated 109 SCAF cells successively as a pilot mass production. The results of the production are also presented and discussed

Keywords

CVD coatings; amorphous semiconductors; elemental semiconductors; p-n junctions; polymer films; silicon; solar cells; sputtered coatings; substrates; CVD reactors; SCAF; Si; Stepping-Roll film deposition; double-junction amorphous silicon solar cell; film-substrate a-Si solar cells; monolithic series-connected structure; pilot mass production; plastic film-substrate; process technologies; sputtering reactors; Amorphous silicon; Apertures; Electrodes; Fabrication; Inductors; Photovoltaic cells; Plastic films; Production; Strontium; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference, 1996., Conference Record of the Twenty Fifth IEEE

Conference_Location

Washington, DC

ISSN

0160-8371

Print_ISBN

0-7803-3166-4

Type

conf

DOI

10.1109/PVSC.1996.564309

Filename

564309