Development of compact ozonizer using wire to plane electrodes

Recently, ozone has been used widely for industrial applications such as water treatment, bleaching a pulp, cleaning a semiconductor substrate and oxidizing a PM (particulate matter) in the DPF (diesel particulate filter). The conventional ozonizers using the silent discharge or the surface discharge need cooling water, and therefore the system becomes larger. A compact ozone generation system has been studied and developed. Here, the system is composed of a compact pulsed power modulator (CPPM) and a compact ozonizer. The developed CPPM uses thyristor switches and magnetic pulse compression circuit. The CPPM can generate an output peak voltage of 20 kV with voltage rise time of about 70 ns, pulse repetition rate of 500 pulses per second (pps), and an input power of 280 W. The developed ozonizer has a number of discharge wires and plane electrodes. Size of the ozonizer is 270 mm × 145 mm × 40 mm. In order to obtain ozone, a positive pulsed voltage is applied to the discharge wires and pulsed streamer discharges are generated. This ozonizer does not use cooling water. The attained ozone production was 6.1 g/h and ozone yield was 86 g/kWh with air flow rate of 20 L/min.