Design and test of 3 GHz, fundamental mode STW resonators on quartz

Author

Denissenko, S. ; Gavignet, E. ; Ballandras, S. ; Bigler, E. ; Cambril, E.

Author_Institution

Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia

fYear

1995

fDate

31 May-2 Jun 1995

Firstpage

469

Lastpage

475

Abstract

Surface transverse wave (STW) resonators, based on the propagation of high velocity shear horizontal waves on Y-rotated quartz are designed, fabricated and tested. A model is presented to predict the resonant frequency of a 3-grating structure as a function of design parameters such as periodicities, metal thickness, finger-to-gap ratio. Experimental devices have been fabricated by direct e-beam lithography with linewidth geometries in the range of 0.3-0.5 μm, operating frequency of 3 GHz in fundamental mode. Two different designs using either a quasi synchronous structure (type 1) or a change of periodicity inside the cavity (type 2) have been tested. Best results obtained at 3 GHz are: unloaded Q-factor Qu=2420, insertion loss I.L.=-10.3 dB (type 1) and Qu=1920, I.L.=-9.5 dB (type 2). The best experimental factor of merit Qu×f=7.5×10¹² is close to the best results already published for quartz STW resonators

Keywords

Q-factor; electron beam lithography; losses; quartz; surface acoustic wave resonators; -10.3 dB; -9.5 dB; 0.3 to 0.5 micron; 3 GHz; Y-rotated quartz; change of periodicity; design parameters; direct e-beam lithography; finger-to-gap ratio; fundamental mode STW resonators; high velocity shear horizontal waves; insertion loss; linewidth geometries; metal thickness; operating frequency; periodicities; quasi synchronous structure; resonant frequency; surface transverse wave resonators; three-grating structure; unloaded Q-factor; Acoustic propagation; Lithography; Microstructure; Oscillators; Physics; Predictive models; Resonant frequency; Strips; Surface waves; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1995. 49th., Proceedings of the 1995 IEEE International

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-2500-1

Type

conf

DOI

10.1109/FREQ.1995.483936

Filename

483936