DocumentCode :
3203000
Title :
A new model for the breakdown dynamics of ultra-thin gate oxides based on the stochastic logistic differential equation
Author :
Miranda, E. ; Jimenez, D.
Author_Institution :
Dept. d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra, Spain
Volume :
2
fYear :
2004
fDate :
16-19 May 2004
Firstpage :
625
Abstract :
Progressive breakdown of ultra-thin (tox≈2 nm) oxides in MOS capacitors is simulated by means of a stochastic logistic process. The model is formulated as an Ito-type differential equation for the conductance and consists of a deterministic term that describes what occurs on average to the system and a random term that deals with the noisy behavior. Instead of considering a detailed description of every physical aspect involved, the proposed model is fundamentally aimed at capturing the degradation dynamics using a small set of parameters. However, despite its seemingly simple formulation, a close look at the numerical simulation scheme is imperative needed in order to understand the Output results as well as its potential pitfalls.
Keywords :
MOS capacitors; dielectric thin films; electric breakdown; semiconductor device breakdown; semiconductor device reliability; stochastic processes; 2 nm; Ito-type differential equation; MOS capacitors; breakdown dynamics; degradation dynamics; noisy behavior; progressive breakdown; random term; stochastic logistic differential equation; ultra-thin gate oxides; Analytical models; Degradation; Dielectric breakdown; Differential equations; Electric breakdown; Logistics; MOS capacitors; Stochastic processes; Stress; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 2004. 24th International Conference on
Print_ISBN :
0-7803-8166-1
Type :
conf
DOI :
10.1109/ICMEL.2004.1314906
Filename :
1314906
Link To Document :
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