• DocumentCode
    3203076
  • Title

    Birefringence characterization on SOI waveguide using optical low coherence interferometry

  • Author

    Hsu, Shih-Hsiang ; Tseng, Sheng-Chieh ; You, Hui-Zhi

  • Author_Institution
    Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
  • fYear
    2010
  • fDate
    1-3 Sept. 2010
  • Firstpage
    249
  • Lastpage
    251
  • Abstract
    An optical low-coherence interferometry was utilized to characterize the birefringence on 5-μm thick silicon-on-insulator waveguides. The SMF-28 fiber was taken as a baseline to demonstrate 2.6×10-3 waveguide birefringence with 5-μm width and 2.5-μm etch depth.
  • Keywords
    birefringence; light interferometry; optical waveguides; silicon-on-insulator; SMF-28 fiber; SOI waveguide; birefringence characterization; optical low coherence interferometry; silicon-on-insulator waveguide; size 2.5 mum; size 5 mum; waveguide birefringence; Optical fiber sensors; Optical fibers; Optical interferometry; Optical polarization; Birefringence; Coherence interferometry; Effective index; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2010 7th IEEE International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-6344-2
  • Type

    conf

  • DOI
    10.1109/GROUP4.2010.5643365
  • Filename
    5643365
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3203076