Development of flexible fiber-type poly-Si solar cell

In order to obtain low-cost, high-performance and flexible silicon solar cell, a novel poly-Si solar cell using glass fiber substrate has been developed. Two ways for preparing poly-Si film on glass fiber for very high deposition rate were studied; one is atmospheric thermal CVD and the other is microwave PECVD. The film prepared by atmospheric thermal CVD showed good crystallinity and high hole mobility of 200cm ²/Vs at a carrier concentration of 6e15cm^-3, despite its high deposition rate. The solar cell was examined on SiO₂ substrate, and cell efficiency by atmospheric thermal CVD was 1.35%. Novel microwave PECVD system specialized for glass fiber substrate was also developed, and poly-Si film could be deposited on the glass fiber substrate at a deposition rate of 1 mum/s