Title :
Optical properties of ErxYb2−xSi2O7 thin film grown by RF magnetron sputtering method
Author :
Zheng, Jun ; Tao, Yeliao ; Wang, Wei ; Chen, Yu ; Ma, Zhihua ; Xue, Chunlai ; Zuo, Yuhua ; Cheng, Buwen ; Wang, Qiming
Author_Institution :
State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
Abstract :
ErxYb2-xSi2O7 thin films are synthesized on thermally oxidized n-Si substrates by RF-magnetron co-sputtering and subsequent annealing process. The photoluminescence properties of ErxYb2-xSi2O7 thin films with 488 nm and 974 nm pumping lasers have been investigated.
Keywords :
annealing; erbium compounds; photoluminescence; sputter deposition; thin films; ytterbium compounds; ErxYb2-xSi2O7; RF magnetron sputtering; annealing; optical properties; photoluminescence; pumping lasers; thermal oxidation; thin films; Annealing; Erbium; Films; Ions; Laser excitation; Pump lasers;
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643394