• DocumentCode
    3203676
  • Title

    Optical properties of ErxYb2−xSi2O7 thin film grown by RF magnetron sputtering method

  • Author

    Zheng, Jun ; Tao, Yeliao ; Wang, Wei ; Chen, Yu ; Ma, Zhihua ; Xue, Chunlai ; Zuo, Yuhua ; Cheng, Buwen ; Wang, Qiming

  • Author_Institution
    State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
  • fYear
    2010
  • fDate
    1-3 Sept. 2010
  • Firstpage
    156
  • Lastpage
    158
  • Abstract
    ErxYb2-xSi2O7 thin films are synthesized on thermally oxidized n-Si substrates by RF-magnetron co-sputtering and subsequent annealing process. The photoluminescence properties of ErxYb2-xSi2O7 thin films with 488 nm and 974 nm pumping lasers have been investigated.
  • Keywords
    annealing; erbium compounds; photoluminescence; sputter deposition; thin films; ytterbium compounds; ErxYb2-xSi2O7; RF magnetron sputtering; annealing; optical properties; photoluminescence; pumping lasers; thermal oxidation; thin films; Annealing; Erbium; Films; Ions; Laser excitation; Pump lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2010 7th IEEE International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-6344-2
  • Type

    conf

  • DOI
    10.1109/GROUP4.2010.5643394
  • Filename
    5643394
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3203676