• DocumentCode
    3203920
  • Title

    Fabrication variations in SOI microrings for DWDM networks

  • Author

    Peng, Z. ; Fattal, D. ; Fiorentino, M. ; Beausoleil, R.G.

  • Author_Institution
    Inf. & Quantum Syst., HP Labs., Palo Alto, CA, USA
  • fYear
    2010
  • fDate
    1-3 Sept. 2010
  • Firstpage
    120
  • Lastpage
    122
  • Abstract
    We present a statistical analysis of fabrications defects in microring resonators fabricated using 248 nm lithography. We measure the scatter of the resonators´ quality factor, extinction ratio, and resonant wavelength and how they influence DWDM networks.
  • Keywords
    Q-factor; micromechanical resonators; nanolithography; optical resonators; silicon-on-insulator; statistical analysis; wavelength division multiplexing; DWDM networks; SOI microrings; dense wavelength division multiplexing; fabrications defects; lithography; microring resonators fabrication; quality factor; silicon-on-insulator; statistical analysis; wavelength 248 nm; Couplings; Fabrication; Nanophotonics; Silicon; Statistical analysis; Wavelength division multiplexing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2010 7th IEEE International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-6344-2
  • Type

    conf

  • DOI
    10.1109/GROUP4.2010.5643406
  • Filename
    5643406