• DocumentCode
    320402
  • Title

    A simple processing sequence for selective emitters [Si solar cells]

  • Author

    Horzel, J. ; Szlufcik, J. ; Nijs, J. ; Mertens, R.

  • Author_Institution
    IMEC, Heverlee, Belgium
  • fYear
    1997
  • fDate
    29 Sep-3 Oct 1997
  • Firstpage
    139
  • Lastpage
    142
  • Abstract
    A novel method to form selective emitters in only one diffusion step without etching or masking steps has been recently introduced for Si solar cells. A phosphorous containing doping source is applied selectively to the front side of a p-type crystalline Si substrate in the form of a paste and subsequently dried. The print is performed with advanced screen printing equipment that allows very precise positioning. In only one diffusion step, deeply diffused regions form under the printed doping source. At the same time, the adjacent regions become weaker doped by P atoms diffusing indirectly from the printed source through the gas ambient into those regions that were not covered by the P paste. The advantages of such a processing sequence over typical industrial processes are addressed. Results from an ongoing optimisation of such a sequence are given and interpreted
  • Keywords
    diffusion; elemental semiconductors; semiconductor device manufacture; semiconductor device testing; semiconductor doping; silicon; solar cells; substrates; thick films; Si; Si solar cells; deeply diffused regions; diffusion step; doping source; p-type crystalline substrate; processing sequence; screen printing equipment; selective emitters fabrication; Belts; Crystallization; Doping; Etching; Furnaces; Metallization; Photovoltaic cells; Printing; Surface resistance; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE
  • Conference_Location
    Anaheim, CA
  • ISSN
    0160-8371
  • Print_ISBN
    0-7803-3767-0
  • Type

    conf

  • DOI
    10.1109/PVSC.1997.654048
  • Filename
    654048