DocumentCode
320402
Title
A simple processing sequence for selective emitters [Si solar cells]
Author
Horzel, J. ; Szlufcik, J. ; Nijs, J. ; Mertens, R.
Author_Institution
IMEC, Heverlee, Belgium
fYear
1997
fDate
29 Sep-3 Oct 1997
Firstpage
139
Lastpage
142
Abstract
A novel method to form selective emitters in only one diffusion step without etching or masking steps has been recently introduced for Si solar cells. A phosphorous containing doping source is applied selectively to the front side of a p-type crystalline Si substrate in the form of a paste and subsequently dried. The print is performed with advanced screen printing equipment that allows very precise positioning. In only one diffusion step, deeply diffused regions form under the printed doping source. At the same time, the adjacent regions become weaker doped by P atoms diffusing indirectly from the printed source through the gas ambient into those regions that were not covered by the P paste. The advantages of such a processing sequence over typical industrial processes are addressed. Results from an ongoing optimisation of such a sequence are given and interpreted
Keywords
diffusion; elemental semiconductors; semiconductor device manufacture; semiconductor device testing; semiconductor doping; silicon; solar cells; substrates; thick films; Si; Si solar cells; deeply diffused regions; diffusion step; doping source; p-type crystalline substrate; processing sequence; screen printing equipment; selective emitters fabrication; Belts; Crystallization; Doping; Etching; Furnaces; Metallization; Photovoltaic cells; Printing; Surface resistance; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE
Conference_Location
Anaheim, CA
ISSN
0160-8371
Print_ISBN
0-7803-3767-0
Type
conf
DOI
10.1109/PVSC.1997.654048
Filename
654048
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