Title :
High speed silicon optical modulator with self-aligned fabrication process
Author :
Thomson, D.J. ; Gardes, F.Y. ; Reed, G.T. ; Fedeli, J.-M.
Author_Institution :
Adv. Technol. Inst., Univ. of Surrey, Guildford, UK
Abstract :
Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.
Keywords :
integrated optics; optical fabrication; optical modulation; silicon; Si; electronic devices; high speed silicon optical modulator; photonic devices; self-aligned fabrication process; self-aligned pn junction formation; High speed optical techniques; Optical device fabrication; Optical modulation; Optical waveguides; Performance evaluation;
Conference_Titel :
Group IV Photonics (GFP), 2010 7th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-6344-2
DOI :
10.1109/GROUP4.2010.5643421
