Title :
Study and application of magnetic bubble manufacturing equipment
Author_Institution :
Sch. of Yanling, CZU, Changzhou, China
Abstract :
In this paper, we have discussed the manufacturing process of magnetic bubble device which including magnetic bubble storage and semiconductor integrated circuit manufacturing technology, especially the method about how to make magnetic bubble uropatagia. We have taken GGG uropatagia for example, and have studied garnet magnetic single crystal film´s growing, evaporating, photoetching, flaking and assembling. By studying magnetic bubble´s performance, we have discussed the application of magnetic bubble devices.
Keywords :
integrated circuit manufacture; magnetic bubble devices; production equipment; storage; GGG uropatagia; device manufacturing process; film assembling; film evaporation; film flaking; film growth; film photoetching; gadolinium gallium garnet; garnet magnetic single crystal film; magnetic bubble device; magnetic bubble manufacturing equipment; magnetic bubble storage; magnetic bubble uropatagia; semiconductor integrated circuit manufacturing technology; Magnetic devices; Magnetic domains; Magnetic films; Magnetic resonance imaging; Performance evaluation; Semiconductor device measurement; Epitaxial masking; Magnetic bubble; Magnetic film; Storage;
Conference_Titel :
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-61284-275-2
DOI :
10.1109/ICEOE.2011.6013083
