Title :
Using video microscopy to characterize micromechanical systems
Author :
Freeman, D.M. ; Davis, C.Q.
Author_Institution :
Res. Lab. of Electron., MIT, Cambridge, MA, USA
Abstract :
Because MEMS combine electrical and mechanical components, testing MEMS includes measuring a variety of types of signals, including both electrical and mechanical signals, at the very least. By comparison to the large number of powerful tools that have been developed to test electrical behaviors of microfabricated systems, relatively few tools are currently available for measuring mechanical properties. We have developed tools for in situ measurement of mechanical properties of MEMS based on light microscopy, video imaging, and machine vision. In this paper, we demonstrate that the system can measure motions of MEMS with nanometer resolution.
Keywords :
CCD image sensors; mechanical properties; mechanical variables measurement; micro-optics; micromechanical devices; optical microscopy; optical testing; MEMS motion measurement; MEMS testing; electrical behaviors; in situ mechanical properties measurement; light microscopy; machine vision; mechanical properties; microfabricated systems; micromechanical systems; nanometer resolution; video imaging; video microscopy; Charge coupled devices; Electric variables measurement; Electronic equipment testing; Focusing; Lighting; Mechanical factors; Mechanical variables measurement; Micromechanical devices; Microscopy; Optical pulses;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689706
