• DocumentCode
    3210161
  • Title

    Double layer formation in a two-region electronegative plasma

  • Author

    Kawamura, E. ; Lieberman, M.A. ; Lichtenberg, A.J. ; Verboncoeur, J.P.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
  • fYear
    2009
  • fDate
    1-5 June 2009
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. We describe the formation of a double layer (DL) in a two- dimensional (2D) electronegative plasma with a source (heating) section connected to a larger diameter downstream section. A 2D particle-in-cell (PIC) code is used to exhibit the DL, which appears near the transition between the source and downstream chambers, over a range of pressures and electronegativities (ratios of negative ion to electron density). Diagnostics of the PIC code allow the calculation of various plasma parameters, not easily measured in experiments, to be compared to an analytic theory. The theory, modifying a previous calculation to conform to the simulation, consists of a collisionless one-dimensional model of a DL separating 2D source and downstream globally-modeled regions. In the global models the conditions of positive and negative ion balance upstream and downstream, and the downstream energy balance, are used to determine the double layer potential, electron temperatures, and other plasma parameters. Because of computational limitations of the PIC simulation, a rescaled oxygen reaction set is used both for the simulation and for the analytic comparison, to accommodate lower densities and smaller sizes than those of a typical experiment. In contrast to experimentally observed electron distributions, the PIC simulations exhibit a Maxwellian electron distribution in the source region at temperature Te2 and a bi- Maxwellian distribution downstream, with a low energy population at a lower temperature Te1 < Te2 and with a hotter tail also having temperature Te2. Using these results in the model, a DL is found in reasonable agreement with that obtained in the simulation. We have also investigated numerically and analytically the range of pressures over which a DL can exist.
  • Keywords
    electronegativity; plasma density; plasma simulation; plasma temperature; 2D electronegative plasma; 2D particle-in-cell code; Maxwellian electron distribution; double layer formation; double layer potential; downstream energy balance; electron temperatures; negative ion balance upstream; plasma parameters; positive ion balance upstream; Analytical models; Computational modeling; Electrons; Plasma density; Plasma diagnostics; Plasma measurements; Plasma simulation; Plasma sources; Plasma temperature; Temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-2617-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.2009.5227251
  • Filename
    5227251