Title :
Low temperature synthesis of two-dimensional carbon nanosheets as a field electron emission material
Author :
Zhu, Mingyao ; Outlaw, R.A. ; Miraldo, Peter ; Kun, Hou ; Manos, Dennis M.
Author_Institution :
Coll. of William & Mary, Williamsburg
Abstract :
In this abstract we report carbon nanosheet synthesis at substrate temperatures lowered by 100-150 degC when utilizing C2H2, rather than CH4, as a precursor. Typical C2H2 carbon nano-sheets were successfully deposited on silicon substrates at 550-600 degC substrate temperatures, with 80-100% C2H2 in H2 concentrations at a fixed 5 seem total gas flow rate, 30-40 mTorr total gas pressures, and 1000 W input RF power.
Keywords :
carbon compounds; carbon nanotubes; electron field emission; low-temperature techniques; silicon; 2D carbon nanosheets; Si; field electron emission material; gas flow rate; low temperature synthesis; temperature 100 C to 150 C; temperature 550 C to 600 C; Atomic layer deposition; Carbon dioxide; Diffraction; Electron emission; Hydrogen; Organic materials; Plasma properties; Plasma temperature; Radio frequency; Scanning electron microscopy;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480952
