Title :
Field emission from hafnium carbide
Author :
Kagarice, K.J. ; Magera, G.G. ; Scheinfein, M.R. ; Mackie, W.A.
Author_Institution :
Appl. Phys. Technol., Inc., McMinnville
Abstract :
An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal field emission source, such as a ZrOW Schottky emitter, by using a cold field emission source (CFE).
Keywords :
electron field emission; hafnium compounds; HfC; cold field emission source; electron source; hafnium carbide; thermal field emission source; Brightness; Cleaning; Crystallization; Electron emission; Electron sources; Energy resolution; Hafnium; Hybrid fiber coaxial cables; Micromagnetics; Physics;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480954
