DocumentCode
3210302
Title
Field emission from hafnium carbide
Author
Kagarice, K.J. ; Magera, G.G. ; Scheinfein, M.R. ; Mackie, W.A.
Author_Institution
Appl. Phys. Technol., Inc., McMinnville
fYear
2007
fDate
8-12 July 2007
Firstpage
108
Lastpage
109
Abstract
An electron source for a high resolution SEM/TEM application should produce a high brightness, have a minimal energy distribution, and should be highly stable. In an application in which the resolution is limited by chromatic aberrations, one can improve the performance over a commonly used thermal field emission source, such as a ZrOW Schottky emitter, by using a cold field emission source (CFE).
Keywords
electron field emission; hafnium compounds; HfC; cold field emission source; electron source; hafnium carbide; thermal field emission source; Brightness; Cleaning; Crystallization; Electron emission; Electron sources; Energy resolution; Hafnium; Hybrid fiber coaxial cables; Micromagnetics; Physics;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location
Chicago, IL
Print_ISBN
978-1-4244-1133-7
Electronic_ISBN
978-1-4244-1134-4
Type
conf
DOI
10.1109/IVNC.2007.4480954
Filename
4480954
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