Title :
The effects of internal stresses on the precision of moveable structures for optical MEMS
Author :
Greek, S. ; Hjort, K.
Author_Institution :
Dept. of Mater. Sci., Uppsala Univ., Sweden
Abstract :
It is vital for the performance of optical MEMS that the bimorph systems are investigated and that the effects of the internal stresses are modelled in the design work. The present work contains a method which can be applied to many material systems in the design work of micromachined structures.
Keywords :
internal stresses; micro-optics; micromechanical devices; optical design techniques; bimorph systems; design work; internal stresses; material systems; micromachined structures; moveable structures; optical MEMS; precision; Compressive stress; Fabry-Perot; Indium phosphide; Internal stresses; Micromechanical devices; Microstructure; Mirrors; Optical films; Optical filters; Tensile stress;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689707
