Fabrication of non-gated carbon nanotube field emission arrays using conventional optical lithography

Carbon nanotube (CNT) field emission cathodes suffer from electric field screening effect arising from densely packed CNTS, resulting in a lower current density. To solve this problem, CNTS have to be separated in a proper manner. One way is to use electron beam lithographic method to produce single CNT arrays. Previously, we have fabricated gated field emission arrays with single CNT emitters by using conventional optical lithography. In this study, we extend our work to the fabrication of non-gated CNT arrays aiming at single CNT emitters.