DocumentCode :
3210663
Title :
Maskless synthesis of Vertically Aligned Carbon Nanofibers (VACNF) field emission arrays on a Laser-Induced Periodic Surface Structures (LIPSS) template
Author :
Guan, Y.F. ; Melechko, A.V. ; Pedraza, A.J. ; Baylor, L.R. ; Rack, P.D.
Author_Institution :
Univ. of Tennessee, Knoxville
fYear :
2007
fDate :
8-12 July 2007
Firstpage :
143
Lastpage :
144
Abstract :
In this paper, a non-lithographic technique that produces organized nanoscale nickel catalyst for carbon nanofiber growth on a silicon substrate is described. This technique involves three consecutive steps: first, the substrate is laser-irradiated to produce a periodic nano rippled structure; second, a thin film of nickel is deposited using glancing angle ion beam sputter-deposition, followed by heat-treatment; and third, a catalytic DC plasma enhanced chemical vapor deposition (PECVD) process is conducted to produce the vertically aligned carbon nanofibers (VACNF).
Keywords :
carbon fibres; catalysts; field emitter arrays; heat treatment; nanoelectronics; nanostructured materials; nanotechnology; nickel; plasma CVD; sputter deposition; C; LIPSS template; Ni; Si; VACNF; catalytic DC PECVD process; field emission arrays; glancing angle ion beam sputter deposition; heat treatment; laser-induced periodic surface structures; maskless synthesis; nanoscale nickel catalyst; nonlithographic technique; periodic nano rippled structure; plasma enhanced chemical vapor deposition; silicon substrate; vertically aligned carbon nanofibers; Carbon dioxide; Chemical lasers; Ion beams; Nickel; Optical arrays; Periodic structures; Silicon; Sputtering; Substrates; Surface structures;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
Type :
conf
DOI :
10.1109/IVNC.2007.4480970
Filename :
4480970
Link To Document :
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