Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

Author

Bielen, Jeroen A. ; Schmidt, Andreas W. ; Weiel, Rolf ; Rutten, Wim L C

Author_Institution

Fac. of Electr. Eng., Twente Univ., Enschede, Netherlands

Volume

1

fYear

1996

fDate

31 Oct-3 Nov 1996

Firstpage

268

Abstract

The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses

Keywords

arrays; bioelectric phenomena; microelectrodes; neurophysiology; prosthetics; semiconductor technology; LIGA method assessment; Si; needle electrode arrays basic stucture fabrication; neural prostheses fabrication tool; patterned interconnection layer; silicon technology; very slim structures yield increase; Biomedical electrodes; Biomedical engineering; Copper; Etching; Fabrication; Needles; Nickel; Resists; Silicon; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1996. Bridging Disciplines for Biomedicine. Proceedings of the 18th Annual International Conference of the IEEE

Conference_Location

Amsterdam

Print_ISBN

0-7803-3811-1

Type

conf

DOI

10.1109/IEMBS.1996.656947

Filename

656947