Title :
Optimization and design of reference voltage for capacitive microaccelerometer
Author :
Liu, Daigui ; Chai, Xuzhao ; Su, Xiaobo ; Gu, Xiaofeng
Author_Institution :
Key Lab. of Adv. Process Control for Light Ind., Jiangnan Univ., Wuxi, China
Abstract :
We develop the reference voltage for readout circuit of the capacitive microaccelerometer, and propose a novel optimization method for the reference voltage to ensure the stability of accelerometer. The optimal value of 1 V can be obtained by the optimization analysis. The reference circuit is implemented and verified using TSMC 0.35 μm CMOS process. Simulation results indicate that the circuit has a temperature coefficient of 7.54 ppm/°C from -25°C to 125°C. By analyzing the error sources of the proposed reference circuit, we find that the circuit inaccuracy is mainly caused by the offset-voltage of operational amplifier and the MOS mismatch, while the mismatch and tolerance of resistors have relatively smaller effect.
Keywords :
MOS integrated circuits; accelerometers; capacitive sensors; microsensors; operational amplifiers; optimisation; readout electronics; reference circuits; CMOS process; MOS; capacitive microaccelerometer; operational amplifier; optimization; readout circuit; reference circuit; size 0.35 mum; stability; Iron; Micromechanical devices; Navigation; Resistors; Transistors; capacitive microaccelerometer; electrostatic actuation; readout circuit; reference voltage;
Conference_Titel :
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-61284-275-2
DOI :
10.1109/ICEOE.2011.6013239
