Title :
A miniaturized Orbitron pump for vacuum nanoelectronics
Author_Institution :
HaWilKo PSS Germany, Ober-Ramstadt
Abstract :
The principle of the Orbitron pump is described. Its miniaturization is simulated. The application of such an UHV pump is based on the availability of electron sources with good resistance against low vacuum levels.
Keywords :
nanoelectronics; vacuum pumps; miniaturized orbitron pump; vacuum nanoelectronics; Anodes; Cathodes; Chemicals; Electron sources; Gettering; Mirrors; Nanoelectronics; Optical devices; Orbits; Sputtering;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4481003
