DocumentCode
3211229
Title
A miniaturized Orbitron pump for vacuum nanoelectronics
Author
Koops, Hans W P
Author_Institution
HaWilKo PSS Germany, Ober-Ramstadt
fYear
2007
fDate
8-12 July 2007
Firstpage
220
Lastpage
220
Abstract
The principle of the Orbitron pump is described. Its miniaturization is simulated. The application of such an UHV pump is based on the availability of electron sources with good resistance against low vacuum levels.
Keywords
nanoelectronics; vacuum pumps; miniaturized orbitron pump; vacuum nanoelectronics; Anodes; Cathodes; Chemicals; Electron sources; Gettering; Mirrors; Nanoelectronics; Optical devices; Orbits; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location
Chicago, IL
Print_ISBN
978-1-4244-1133-7
Electronic_ISBN
978-1-4244-1134-4
Type
conf
DOI
10.1109/IVNC.2007.4481003
Filename
4481003
Link To Document