Correction to Thermal Impedance Measurements Made Under Non-Equilibrium Conditions

The measurement of semiconductor device thermal impedance is in general easier to perform experimentally if the heating and measuring phases are performed separately in order to avoid mutual interference. However, unless we are able to guarantee that the system is in equilibrium before performing the measurement, the result is not the real thermal impedance. This work presents a method to extend the validity of a measurement made under non-equilibrium conditions to fit the real value of thermal impedance.