Highly efficient grating coupler between optical fiber and silicon-on-insulator waveguide

Author

Jin, Yujian ; Xue, Chenyang ; Chou, Xiujian ; Cui, Danfeng ; Tong, Xiaogang

Author_Institution

Sci. & Technol. on Electron. Test & Meas. Lab., North Univ. of China, Taiyuan, China

Volume

2

fYear

2011

fDate

29-31 July 2011

Abstract

In order to increase the coupling efficiency between single mode optical fiber and SOI waveguide, in this paper we present the design of a diffractive grating structure and then get the optimal parameters which can reach 67% coupling efficiency though FDTD simulation. The grating is fabricated on the SOI waveguide by focused ion beam (FIB) lithography. Because side wall roughness caused by fabrication tolerances and extra losses finally we measured a 17.5% coupling efficiency of the grating coupler between optical fiber and silicon waveguide.

Keywords

diffraction gratings; finite difference time-domain analysis; focused ion beam technology; integrated optics; ion beam lithography; optical design techniques; optical fibre couplers; optical fibre fabrication; optical fibre losses; silicon-on-insulator; FDTD simulation; SOI waveguide; Si; coupling efficiency; diffractive grating structure; focused ion beam lithography; highly efficient grating coupler; side wall roughness; silicon-on-insulator waveguide; single mode optical fiber; Optical coupling; Optical device fabrication; Optical diffraction; Optical fiber sensors; Optical fibers; coupling; grating; optical waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics and Optoelectronics (ICEOE), 2011 International Conference on

Conference_Location

Dalian

Print_ISBN

978-1-61284-275-2

Type

conf

DOI

10.1109/ICEOE.2011.6013262

Filename

6013262