Micromechanical fiber optic switches based on electromagnetic torsion mirrors

Author

Toshiyoshi, H. ; Miyauchi, D. ; Fujita, H.

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1998

fDate

20-24 July 1998

Abstract

Summary form only given. Micromachined optical switches are under intensive study for data communication networks and measurement instruments. We have demonstrated electrostatic micro torsion mirrors for fiber optic switches. However, the electrostatic operation required large operation voltage. On the other hand the magnetic operation is expected to realize self-latching optical switches, which hold on/off-state without power consumption. We study the magnetic operation of NiFeCo sputterd torsion mirrors.

Keywords

cobalt alloys; electromagnetic devices; iron alloys; micro-optics; micromachining; mirrors; nickel alloys; optical communication equipment; optical switches; torsion; NiFeCo; NiFeCo sputterd torsion mirrors; data communication networks; electromagnetic torsion mirrors; electrostatic micro torsion mirrors; electrostatic operation; fiber optic switches; large operation voltage; magnetic operation; measurement instruments; micromachined optical switches; micromechanical fiber optic switches; on/off-state; self-latching optical switches; Communication switching; Data communication; Electromagnetic measurements; Electrostatic measurements; Instruments; Micromechanical devices; Mirrors; Optical fibers; Optical switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689713

Filename

689713