DocumentCode
3211551
Title
Research on Skill Knowledge and Process Simulation-Based Virtual MEMS Manufacturing System
Author
Guang-Yi Sun ; Xin Zhao ; Gui-Zhang Lu
Author_Institution
Inst. of Robotics & Inf. Autom. Syst., Tianjin, China
fYear
2006
fDate
7-11 Aug. 2006
Firstpage
1367
Lastpage
1372
Abstract
This paper puts forward the concept of virtual MEMS manufacturing system based on skill knowledge and process simulation. Concretely, using optical lithography as the breakthrough, this paper details a virtual lithography prototyping system and key problems. In addition, the alignment simulation example of fabricating micro-acceleration indicates the feasibility of system.
Keywords
discrete event simulation; lithography; manufacturing systems; micromechanical devices; virtual prototyping; alignment simulation; microacceleration fabrication; microelectromechanical system; optical lithography; process simulation; skill knowledge; virtual MEMS manufacturing system; virtual lithography prototyping system; Electronic mail; IEEE catalog; Lithography; Manufacturing systems; Micromechanical devices; Robotics and automation; Sun; Virtual manufacturing; Virtual prototyping; Virtual reality; Lithography; MEMS; Process Simulation; Virtual Manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference, 2006. CCC 2006. Chinese
Conference_Location
Harbin
Print_ISBN
7-81077-802-1
Type
conf
DOI
10.1109/CHICC.2006.280677
Filename
4060309
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