Title :
Polysiloxane Thin Films Optimisation for Potassium Detection using EIS Characterisation with Microelectrode Structures
Author :
Torbiéro, B. ; Launay, J. ; Benyahia, A. ; Martinez, A. ; Temple-Boyer, P.
Author_Institution :
Univ. of Toulouse, Toulouse
Abstract :
Most chemical or biochemical analysis use current-voltage I(V) characterization as detection principle. Thus, the development of microelectrodes using standard silicon technologies process is required: they show advantages of mass production, generic structure, small dimensions, low cost, and are well adapted for the detection of chemical, biochemical or biological species in aqueous environment using specific impedimetric measurement methods.
Keywords :
chemical sensors; electric impedance measurement; electrochemical electrodes; electrochemical impedance spectroscopy; microelectrodes; polymer films; potassium; spin coating; EIS characterisation; K; biochemical analysis; current-voltage I(V) characterization; impedimetric measurement method; mass production; microelectrode structures; polysiloxane thin films optimisation; potassium detection; silicon technologies process; Biochemical analysis; Chemical analysis; Chemical technology; Costs; Mass production; Measurement standards; Microelectrodes; Silicon; Standards development; Transistors; Impedance spectroscopy; Polysiloxane films; Potassium detection; Spin coating deposition;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems, 2007. MIXDES '07. 14th International Conference on
Conference_Location :
Ciechocinek
Print_ISBN :
83-922632-9-4
Electronic_ISBN :
83-922632-9-4
DOI :
10.1109/MIXDES.2007.4286209