DocumentCode :
3212632
Title :
SECTION 6 Models and methods for microelectromechanical systems
fYear :
2009
fDate :
24-28 Feb. 2009
Firstpage :
497
Lastpage :
497
Abstract :
Start of the above-titled section of the conference proceedings record.
Keywords :
Microelectromechanical systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
Type :
conf
Filename :
4839892
Link To Document :
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