Design and electro-thermal analysis of MEMS based Micro-hotplate for gas sensor

Electro-thermal analysis of MEMS based Micro-hotplate design for gas sensor applications has been studied in this paper. Coventor-WareTM (A MEMS design and simulation software) has been used for electro-thermal analysis of 3D coupled field finite element model. In this simulation, temperature and power are evaluated with the variation of the thickness of the DilverPl heater layer. At the sensor temperature (typically 1500C-2000C), the power consumption is greatly reduced as the thickness decreases from 1 to 0.25 μm. The simulation results indicate that the design with 0.25μm DilverPI hot plate requires very low power consumption of 15.08mW, is suitable for gas sensor.