DocumentCode
3212801
Title
Do ions heat up in the presheath, in the direction perpendicular to the flow? Results for a weakly collisional argon plasma
Author
Severn, G.D. ; Hershkowitz, N.
Author_Institution
Univ. of San Diego, San Diego, CA, USA
fYear
2009
fDate
1-5 June 2009
Firstpage
1
Lastpage
1
Abstract
Summary form only given. Laser-induced fluorescence (LIF) measurements made with a diode laser have measured the transverse metastable ion velocity distribution function profile near a negatively biased plate in a low temperature (Te < 1 eV), low pressure (p0 < 1 mTorr) DC multidipole argon discharge plasma. Results indicate that the transverse temperature doubles as the ions transit the presheath. The metastable argon ions in the 3s23p4(3P)3d 4F7/2 state are found to be characterized by a Maxwellian temperature transverse to the direction normal to the plate. For a neutral pressure of 0.3 mTorr, the transverse temperature increases along the presheath from 0.026 eV in the bulk plasma to 0.058 eV at the presheath sheath boundary. This result is compared with the PIC code simulation results of Meige et al, and with the experimental results of Claire et al.
Keywords
argon; discharges (electric); fluorescence; ion mobility; plasma sheaths; plasma temperature; Ar; DC multidipole argon discharge plasma; LIF measurements; Maxwellian temperature; diode laser; flow direction; ion heating; laser-induced fluorescence; presheath; pressure 0.3 mtorr; sheath boundary; transverse metastable ion velocity distribution function profile; transverse temperature; weakly collisional argon plasma; Argon; Diode lasers; Distribution functions; Fluorescence; Metastasis; Plasma measurements; Plasma temperature; Pressure measurement; Temperature distribution; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
0730-9244
Print_ISBN
978-1-4244-2617-1
Type
conf
DOI
10.1109/PLASMA.2009.5227377
Filename
5227377
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