Title :
A fiber-optic tactile microsensor for detection of tip of a fiberscope
Author :
Tohyama, O. ; Maeda, S. ; Itoh, H.
Author_Institution :
Central Res. Lab., Mitsubishi Cable Ind. Ltd., Itami, Japan
Abstract :
A fiber-optic tactile microsensor has been developed and estimated. The sensing principle is based on the detection of optical reflection intensity changes from a diaphragm located in front of an optical fiber. The sensors have been fabricated using silicon micromachining and laser ablation processes. For the transmitting source and signal light, a multimode optical fiber 50/125 /spl mu/m (core/clad) in diameter is used. The results show that easy and safe tactile measurements are possible in blood vessels. This paper describes the structure, fabrication process and performance of the sensor.
Keywords :
biosensors; fibre optic sensors; laser ablation; micro-optics; micromachining; microsensors; reflectivity; tactile sensors; 125 mum; 50 mum; biosensors; blood vessel; fabrication process; fiber-optic tactile microsensor; fiberscope tip detection; laser ablation process; multimode optical fiber; optical reflection intensity changes; sensing principle; signal light; silicon micromachining; tactility measurements; transmitting source; Blood vessels; Fiber lasers; Laser ablation; Micromachining; Microsensors; Optical detectors; Optical fiber sensors; Optical fibers; Optical reflection; Silicon;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689721
