Title :
Computation and simulation of static deformation for MEMS deformable mirror
Author :
Li, Jie ; Chen, Xiqu
Author_Institution :
Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China
Abstract :
The static property of a deformable mirror is discussed in this paper. The function of the deformation is obtained under some assumptions and further simplified for the mirror. From the result, it is proved to be an accurate one. At the same time the correlation between the deformation and applied voltage is put forward, providing a way for controlling the mirror.
Keywords :
Galerkin method; deformation; micro-optomechanical devices; micromirrors; Galerkin method; MEMS deformable mirror; micromirrors; static deformation; Galerkin method; MEMS; deformable mirror;
Conference_Titel :
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-61284-275-2
DOI :
10.1109/ICEOE.2011.6013338
