DocumentCode
321317
Title
Time-varying optimal controller for rapid thermal processing (RTP) reactors
Author
Kamali, Jalil ; Kosut, Robert L.
Author_Institution
CVC Products, Fremont, CA, USA
Volume
3
fYear
1997
fDate
10-12 Dec 1997
Firstpage
2541
Abstract
In this paper a time-varying optimal controller is designed for a generic rapid thermal processing (RTP) system. Due to the time-varying nature of the linearized model around the reference trajectory, this controller is optimal and more reliable than constant compensators
Keywords
compensation; control system synthesis; feedback; feedforward; integrated circuit manufacture; linear quadratic control; linearisation techniques; nonlinear control systems; rapid thermal processing; time-varying systems; linearized model; rapid thermal processing reactors; time-varying optimal controller; Adaptive control; Control systems; Feedback; Inductors; Optimal control; Power system modeling; Rapid thermal processing; Regulators; Semiconductor device modeling; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 1997., Proceedings of the 36th IEEE Conference on
Conference_Location
San Diego, CA
ISSN
0191-2216
Print_ISBN
0-7803-4187-2
Type
conf
DOI
10.1109/CDC.1997.657707
Filename
657707
Link To Document