Title :
Time-varying optimal controller for rapid thermal processing (RTP) reactors
Author :
Kamali, Jalil ; Kosut, Robert L.
Author_Institution :
CVC Products, Fremont, CA, USA
Abstract :
In this paper a time-varying optimal controller is designed for a generic rapid thermal processing (RTP) system. Due to the time-varying nature of the linearized model around the reference trajectory, this controller is optimal and more reliable than constant compensators
Keywords :
compensation; control system synthesis; feedback; feedforward; integrated circuit manufacture; linear quadratic control; linearisation techniques; nonlinear control systems; rapid thermal processing; time-varying systems; linearized model; rapid thermal processing reactors; time-varying optimal controller; Adaptive control; Control systems; Feedback; Inductors; Optimal control; Power system modeling; Rapid thermal processing; Regulators; Semiconductor device modeling; Temperature;
Conference_Titel :
Decision and Control, 1997., Proceedings of the 36th IEEE Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-4187-2
DOI :
10.1109/CDC.1997.657707
