DocumentCode
321323
Title
A state dependent Riccati equation filter for a rapid thermal processing system
Author
Belikov, Sergey ; Kamali, Jalil ; Friedland, Bernard
Author_Institution
New Jersey Inst. of Technol., Newark, NJ, USA
Volume
3
fYear
1997
fDate
10-12 Dec 1997
Firstpage
2547
Abstract
A state dependent algebraic Riccati equation filter (SDAREF) has been successfully applied to a rapid thermal processing system. SDAREF with a special parametrization of dynamics and sensor model (optical pyrometers) gives substantially better results than the extended Kalman filter
Keywords
Riccati equations; control system synthesis; filtering theory; integrated circuit manufacture; nonlinear control systems; optical sensors; pyrometers; rapid thermal processing; dynamics; optical pyrometers; rapid thermal processing system; sensor model; state dependent Riccati equation filter; Integrated circuit modeling; Optical filters; Optical noise; Optical sensors; Rapid thermal processing; Riccati equations; Semiconductor device modeling; Sensor phenomena and characterization; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 1997., Proceedings of the 36th IEEE Conference on
Conference_Location
San Diego, CA
ISSN
0191-2216
Print_ISBN
0-7803-4187-2
Type
conf
DOI
10.1109/CDC.1997.657719
Filename
657719
Link To Document