Micro-mechanical optoelectronic switch and amplifier (MIMOSA)

Author

Waters, R. ; Patterson, J. ; Van Zeghbroeck, B.

Author_Institution

Dept. of Electr. Eng., Colorado Univ., Boulder, CO, USA

fYear

1998

fDate

20-24 July 1998

Abstract

We report for the first time the monolithic integration of a micro-mechanical modulator and a p-n photodiode on a silicon substrate. Such a structure can be used as a wavelength tunable detector and as a versatile optoelectronic device. In addition, we also demonstrate that such a device combination yields a transistor-like element with positive and negative small-signal voltage gain.

Keywords

electro-optical modulation; integrated optoelectronics; micro-optics; micromechanical devices; p-i-n photodiodes; photodetectors; MIMOSA; micro-mechanical modulator; micro-mechanical optoelectronic switch and amplifier; monolithic integration; negative small-signal voltage gain; p-n photodiode; positive small-signal voltage gain; silicon substrate; transistor-like element; versatile optoelectronic device; wavelength tunable detector; Fabry-Perot; Gold; Mirrors; Optical modulation; P-n junctions; Photoconductivity; Photodiodes; Silicon compounds; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689724

Filename

689724