Diamond microstructures for optical MEMS

Author

Bjorkman, H. ; Rangsten, P. ; Hollman, P. ; Hjort, K.

Author_Institution

Dept. of Mater. Sci., Uppsala Univ., Sweden

fYear

1998

fDate

20-24 July 1998

Abstract

Diamond is difficult to micromachine due to its hardness and chemical inertness. Therefore it is preferable to make use of diamond replication. The well developed area of silicon micromachining makes it possible to fabricate complicated structures that can be used as moulds for diamond. A microstructure technology for diamond replicas following the authors process flow scheme below is given. Different silicon microstructures have been manufactured by standard bulk micromachining processes i.e. lithography, wet etching, and dry etching, to evaluate diamond replication.

Keywords

crystal microstructure; diamond; etching; lithography; micro-optics; micromachining; micromechanical devices; optical fabrication; C; Si; chemical inertness; diamond microstructures; diamond replicas; diamond replication; dry etching; lithography; microstructure technology; moulds; optical MEMS; process flow scheme; silicon micromachining; silicon microstructures; standard bulk micromachining processes; wet etching; Etching; Micromechanical devices; Microstructure; Optical films; Optical materials; Rough surfaces; Semiconductor materials; Silicon; Surface roughness; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689734

Filename

689734