DocumentCode
3215796
Title
Technique to improve flatness of MEM backplanes
Author
Seunarine, K. ; Underwood, I.
Author_Institution
Dept. of Electr. Eng., Edinburgh Univ., UK
fYear
1998
fDate
20-24 July 1998
Abstract
All reflective optical devices fabricated on silicon require flat backplanes. Unfortunately the thermal processing, which is essential in the manufacture of such devices, causes the silicon die to become warped. This backplane warping produces spurious phase modulation effects when the devices are used in coherent applications. Our investigations have been carried out on liquid crystal over silicon (LCOS) SLMs.
Keywords
liquid crystal devices; micro-optics; micromechanical devices; optical backplanes; optical fabrication; spatial light modulators; MEM backplanes flatness; backplane warping; coherent applications; liquid crystal over Si spatial light modulators; reflective optical devices; silicon die warping; spurious phase modulation effects; thermal processing; Aluminum; Assembly; Backplanes; Geometry; Glass; Liquid crystals; Mirrors; Optical interferometry; Resists; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location
Monterey, CA, USA
Print_ISBN
0-7803-4953-9
Type
conf
DOI
10.1109/LEOSST.1998.689735
Filename
689735
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