DocumentCode
3215975
Title
Characterization Of New A-Si:H Detectors Fabricated From Amorphous Silicon Deposited At High Rate By Helium Enhanced PECVD
Author
Pochet, T. ; Ilie, A. ; Foulon, F. ; Equer, B.
Author_Institution
CEA-Technologies
fYear
1993
fDate
31 Oct-6 Nov 1993
Firstpage
450
Lastpage
454
Keywords
Alpha particles; Amorphous silicon; Electric variables; Fabrication; Helium; Optical materials; Space charge; Voltage; X-ray detection; X-ray detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium and Medical Imaging Conference, 1993., 1993 IEEE Conference Record.
Print_ISBN
0-7803-1487-5
Type
conf
DOI
10.1109/NSSMIC.1993.701702
Filename
701702
Link To Document