Towards an integrated sub-nanogram mass measurement system

Author

Ghodsian, B. ; Chen, J.M. ; Parameswaran, M. ; Syrzycki, M.

Author_Institution

Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada

fYear

1996

fDate

9-11 Oct 1996

Firstpage

71

Lastpage

80

Abstract

This paper reports on developing the working prototype of a miniaturized mass measurement system for measurements of object´s mass in the range of nanograms, in liquid and gaseous environments, using commercially available CMOS-compatible micromachining technology. When used in liquid environment, the device will be able to determine bio-masses of biological cells. The entire system will comprise of a four components, that will be integrated onto a single silicon substrate, using silicon CMOS-compatible micromachining technology and hybrid assembly technique: (a) micromachined resonant structures for mass measurement, (b) resonance sensors with associated electronics circuitry, (c) micromachined planar coil, (d) miniaturized electromagnet device

Keywords

CMOS analogue integrated circuits; biological techniques; biosensors; mass measurement; micromachining; micromechanical resonators; microsensors; weighing; CMOS operational amplifier; CMOS-compatible micromachining technology; bio-masses; biological cells; gaseous environments; hybrid assembly technique; liquid environments; micromachined planar coil; micromachined resonant structures; miniaturized electromagnet device; resonance sensors; sub-nanogram mass measurement system; Assembly systems; Biological cells; CMOS technology; Electromagnetic measurements; Integrated circuit technology; Micromachining; Nanobioscience; Prototypes; Resonance; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Innovative Systems in Silicon, 1996. Proceedings., Eighth Annual IEEE International Conference on

Conference_Location

Austin, TX

ISSN

1063-2204

Print_ISBN

0-7803-3639-9

Type

conf

DOI

10.1109/ICISS.1996.552413

Filename

552413