Deflectable micro-mirror arrays for implementation of a recirculating folded perfect shuffle processor

Author

Hare, A.E. ; Beyette, F.R., Jr.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

fYear

1998

fDate

20-24 July 1998

Abstract

An optical interconnect system based on deflectable micro-mirrors is discussed. The electrostatically actuated mirrors are surface micro-machined on a silicon substrate and positioned for implementation of an optical folded perfect shuffle. Design criteria and application to smart pixel systems are presented.

Keywords

electro-optical deflectors; electrostatic devices; micro-optics; micromachining; micromechanical devices; mirrors; optical design techniques; optical fabrication; optical interconnections; smart pixels; deflectable micro-mirror arrays; deflectable micro-mirrors; design criteria; electrostatically actuated mirrors; optical folded perfect shuffle; optical interconnect system; positioned; recirculating folded perfect shuffle processor; silicon substrate; smart pixel systems; surface micro-machined; Detectors; Micromechanical devices; Mirrors; Optical arrays; Optical computing; Optical interconnections; Optical modulation; Sensor arrays; Silicon; Smart pixels;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689737

Filename

689737