• DocumentCode
    3216300
  • Title

    Testing of pumping speed of miniature sputtering ion pump

  • Author

    Tian Liang ; Sen Zhang ; Wang, C.F.

  • Author_Institution
    Nanjing Sanle Electron. Inf. Ind. Group Co, Ltd., Nanjing, China
  • fYear
    2010
  • fDate
    14-16 Oct. 2010
  • Firstpage
    534
  • Lastpage
    535
  • Abstract
    This paper discusses about testing of pumping speed. A sputtering ion pump consists basically of two electrodes, anode and cathode, and a magnet. The method for testing pumping speed is called dynamic flow conductance.
  • Keywords
    electrochemical electrodes; ion pumps; sputtering; testing; velocity measurement; anode; cathode; dynamic flow conductance; electrode; magnet; pumping speed; speed testing; sputtering ion pump; Anodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4244-6645-0
  • Type

    conf

  • DOI
    10.1109/IVESC.2010.5644208
  • Filename
    5644208
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3216300