DocumentCode
3216392
Title
Ambient gas properties of field emission devices
Author
Jinchan Wang ; Xiaobing Zhang ; Wei Lei ; Fuming Mao ; Yunkang Cui
Author_Institution
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
fYear
2010
fDate
14-16 Oct. 2010
Firstpage
297
Lastpage
298
Abstract
In order to study whether the ambient gases affect the emission current stability of the cathode, the cathode should be the same one. In addition, the working condition should be kept constant except the ambient gas condition, so that other factors, which may also lead to the emission current degradation of the cathode, can be avoided. Only the influence from the residual gases will be concerned. For this consideration, an experimental system was set up, as shown in Fig. 1. It consisted of a vacuum system with a quadrupole mass spectrometer (QMS) and FE device opening set to introduce the residual gases inside the FE device into the analysis system.
Keywords
cathodes; electron field emission; vacuum microelectronics; ambient gas condition; ambient gas properties; analysis system; cathode; emission current degradation; emission current stability; experimental system; field emission devices; quadrupole mass spectrometer; residual gases; vacuum system; working condition; Educational institutions;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location
Nanjing
Print_ISBN
978-1-4244-6645-0
Type
conf
DOI
10.1109/IVESC.2010.5644211
Filename
5644211
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