• DocumentCode
    3216392
  • Title

    Ambient gas properties of field emission devices

  • Author

    Jinchan Wang ; Xiaobing Zhang ; Wei Lei ; Fuming Mao ; Yunkang Cui

  • Author_Institution
    Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
  • fYear
    2010
  • fDate
    14-16 Oct. 2010
  • Firstpage
    297
  • Lastpage
    298
  • Abstract
    In order to study whether the ambient gases affect the emission current stability of the cathode, the cathode should be the same one. In addition, the working condition should be kept constant except the ambient gas condition, so that other factors, which may also lead to the emission current degradation of the cathode, can be avoided. Only the influence from the residual gases will be concerned. For this consideration, an experimental system was set up, as shown in Fig. 1. It consisted of a vacuum system with a quadrupole mass spectrometer (QMS) and FE device opening set to introduce the residual gases inside the FE device into the analysis system.
  • Keywords
    cathodes; electron field emission; vacuum microelectronics; ambient gas condition; ambient gas properties; analysis system; cathode; emission current degradation; emission current stability; experimental system; field emission devices; quadrupole mass spectrometer; residual gases; vacuum system; working condition; Educational institutions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4244-6645-0
  • Type

    conf

  • DOI
    10.1109/IVESC.2010.5644211
  • Filename
    5644211