Identification of Dynamic Model with Non-smooth Nonlinearity for Macro-moving Stage in Ultra-precision Positioning System

This paper presents the architecture of a macro-moving stage of an ultra-precision positioning system. This is a dynamic system with non-smooth nonlinearity such as stickiness and Coulomb frictions. In order to model this system, a hybrid modeling approach with both first principles method and parameter-estimation technique is proposed in this paper. It is rather convenient to determine the structure of the model as well as the non-smooth nonlinear characteristic. Moreover, the parameter estimate for the linear part of the model can be specified as the non-smooth linearity is identified. The experimental results illustrate that the obtained method is promising.