Title :
Fast field solver programs for thermal and electrostatic analysis of microsystem elements
Author :
Szekely, V. ; Rencz, M.
Author_Institution :
Budapest Tech. Univ., Hungary
Abstract :
To solve the problem of fast thermal and electrostatic simulation of microsystem elements two different field solver tools have been developed at TUB. The /spl mu/S-THERMANAL program is capable for the fast steady state and dynamic simulation of suspended multilayered microsystem structures, while the 2D-SUNRED program is the first version of a general field solver program, based on an original method, successive network reduction. This program offers a very fast and accurate substitute for FEM programs for the solution of the Poisson equation, e.g. solving a 32000 grid problem in about 6 minutes on a 586 PC. Application examples show the usability of the tools.
Keywords :
circuit analysis computing; electrostatics; finite difference methods; heat transfer; microcomputer applications; microsensors; temperature distribution; /spl mu/S-THERMANAL program; 2D-SUNRED program; PC; Poisson equation; fast dynamic simulation; fast electrostatic simulation; fast field solver programs; fast steady state simulation; fast thermal simulation; grid problem; microsystem elements; successive network reduction; suspended multilayered microsystem structures; Simulation software;
Conference_Titel :
Computer-Aided Design, 1997. Digest of Technical Papers., 1997 IEEE/ACM International Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
0-8186-8200-0
DOI :
10.1109/ICCAD.1997.643612
