Fast field solver programs for thermal and electrostatic analysis of microsystem elements

Author

Szekely, V. ; Rencz, M.

Author_Institution

Budapest Tech. Univ., Hungary

fYear

1997

fDate

9-13 Nov. 1997

Firstpage

684

Lastpage

689

Abstract

To solve the problem of fast thermal and electrostatic simulation of microsystem elements two different field solver tools have been developed at TUB. The /spl mu/S-THERMANAL program is capable for the fast steady state and dynamic simulation of suspended multilayered microsystem structures, while the 2D-SUNRED program is the first version of a general field solver program, based on an original method, successive network reduction. This program offers a very fast and accurate substitute for FEM programs for the solution of the Poisson equation, e.g. solving a 32000 grid problem in about 6 minutes on a 586 PC. Application examples show the usability of the tools.

Keywords

circuit analysis computing; electrostatics; finite difference methods; heat transfer; microcomputer applications; microsensors; temperature distribution; /spl mu/S-THERMANAL program; 2D-SUNRED program; PC; Poisson equation; fast dynamic simulation; fast electrostatic simulation; fast field solver programs; fast steady state simulation; fast thermal simulation; grid problem; microsystem elements; successive network reduction; suspended multilayered microsystem structures; Simulation software;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer-Aided Design, 1997. Digest of Technical Papers., 1997 IEEE/ACM International Conference on

Conference_Location

San Jose, CA, USA

ISSN

1092-3152

Print_ISBN

0-8186-8200-0

Type

conf

DOI

10.1109/ICCAD.1997.643612

Filename

643612