• DocumentCode
    3216705
  • Title

    The emission spectra diagnosis in microwave argon and argon-air plasmas

  • Author

    Zhang, G.X. ; Wang, S.M. ; Zhang, Q. ; Liu, L.

  • Author_Institution
    Dept. of Electr. Eng. & Appl. Electron. Technol., Tsinghua Univ., Beijing, China
  • fYear
    2009
  • fDate
    1-5 June 2009
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    This paper diagnoses the emission spectra of the Ar plasmas, which are excited at different pressure from 0.1 to 0.8 atm, and Ar-air plasma in open air with a unique microwave plasma generator-APMPS+JET system. The results demonstrate that the previous excited atom stations die out obviously as air is added; various factors play a part in the transform of atomic spectra lines, such as energy input, and voltage as well as the proportion of air input. With the decrease of pressure, the electron temperature and the intensity of spectrum increases in Ar plasma; the electron temperature is about 1.5~2eV at 0.8atm and rises to 4~5eV at 0.1 atm; the low wavelength components strengthen simultaneously.
  • Keywords
    argon; plasma diagnostics; plasma production; plasma temperature; APMPS+JET system; argon-air plasma; atomic spectra lines; electron temperature; emission spectra diagnosis; microwave argon plasma; microwave plasma generator; pressure 0.1 atm to 0.8 atm; Argon; Discharges; Electrons; Laboratories; Microwave technology; Optical waveguides; Plasma diagnostics; Plasma temperature; Plasma waves; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-2617-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.2009.5227562
  • Filename
    5227562