DocumentCode
3216705
Title
The emission spectra diagnosis in microwave argon and argon-air plasmas
Author
Zhang, G.X. ; Wang, S.M. ; Zhang, Q. ; Liu, L.
Author_Institution
Dept. of Electr. Eng. & Appl. Electron. Technol., Tsinghua Univ., Beijing, China
fYear
2009
fDate
1-5 June 2009
Firstpage
1
Lastpage
1
Abstract
This paper diagnoses the emission spectra of the Ar plasmas, which are excited at different pressure from 0.1 to 0.8 atm, and Ar-air plasma in open air with a unique microwave plasma generator-APMPS+JET system. The results demonstrate that the previous excited atom stations die out obviously as air is added; various factors play a part in the transform of atomic spectra lines, such as energy input, and voltage as well as the proportion of air input. With the decrease of pressure, the electron temperature and the intensity of spectrum increases in Ar plasma; the electron temperature is about 1.5~2eV at 0.8atm and rises to 4~5eV at 0.1 atm; the low wavelength components strengthen simultaneously.
Keywords
argon; plasma diagnostics; plasma production; plasma temperature; APMPS+JET system; argon-air plasma; atomic spectra lines; electron temperature; emission spectra diagnosis; microwave argon plasma; microwave plasma generator; pressure 0.1 atm to 0.8 atm; Argon; Discharges; Electrons; Laboratories; Microwave technology; Optical waveguides; Plasma diagnostics; Plasma temperature; Plasma waves; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
0730-9244
Print_ISBN
978-1-4244-2617-1
Type
conf
DOI
10.1109/PLASMA.2009.5227562
Filename
5227562
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