Title :
Fabrication and interface electrical properties of Fe3O4/MgO/GaAs(100) spin contacts
Author :
Wong, P.K.J. ; Zhang, Wensheng ; Xu, Yong Bing
Author_Institution :
Dept. of Electron., Univ. of York, York, UK
Abstract :
Moderately doped n-GaAs(100) substrates (n= 5 x 10 17cm3 ) with In Ohmic back contacts were annealed in the growth chamber with a base pressure of 1 x 10-8 mbar for 60 min at 830 K prior to the film stack growth. MgO layer was then grown by e-beam evaporation at a rate of 2 Amin-1 while the substrates were kept at 673 K, followed by postgrowth annealing of a 3.0 nm thick epitaxial Fe at 500 K in an O2 partial pressure of 5 x 10-5 mbar for 10 min. As for Fe3O4-GaAs(100), the tunneling barrier deposition was skipped. The epitaxial spin contacts were ex situ characterized by current-voltage (I-V) measurements. The junction size ranges from 25 to 200 μm square and were patterned by standard photolithography and wet etching using a 50 nm thick thermally evaporated Au layer as an etch mask.
Keywords :
annealing; doping; epitaxial growth; epitaxial layers; etching; gallium arsenide; interface structure; iron compounds; magnesium compounds; nanolithography; ohmic contacts; photolithography; Au layer; Fe3O4-GaAs(100); Fe3O4-MgO-GaAs; Fe3O4-MgO-GaAs(100) spin contacts; In ohmic back contacts; MgO layer; current-voltage measurements; doped n-GaAs(100) substrates; e-beam evaporation; epitaxial Fe; epitaxial spin contacts; etch mask; film stack growth; interface electrical properties; junction size; photolithography; postgrowth annealing; size 25 mum to 200 mum; size 3 nm; size 50 nm; temperature 500 K; temperature 673 K; temperature 830 K; thermal evaporation; time 10 min; time 60 min; tunneling barrier deposition; wet etching; Epitaxial growth; Photonic band gap;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644245